計量儀BPG402-Sx 大(da)氣(qi)壓(ya)至超(chao)高(gao)真空真(zhen)空(kong)計(ji)

BPG402-Sx 大(da)氣(qi)壓(ya)至超(chao)高(gao)真空真(zhen)空(kong)計(ji)

INFICON 貝(bei)阿(e)德(de)-阿(e)爾珀(po)特皮拉(la)尼(ni)（Pirani）BPG402-S型(xing)復(fu)合(he)真(zhen)空計將(jiang)兩(liang)種(zhong)真空(kong)計的功能(neng)融(rong)合(he)到(dao)壹個(ge)緊湊(cou)型(xing)裝(zhuang)置(zhi)中，測量範(fan)圍(wei)為(wei) 5×10-10 毫(hao)巴(ba)至大(da)氣(qi)壓(ya)（3.8×10-10 托至大(da)氣(qi)壓(ya)）。多項技(ji)術(shu)相(xiang)結(jie)合(he)降(jiang)低了安(an)裝、設(she)置(zhi)和集成的復雜(za)性。選擇(ze)帶(dai)有兩(liang)根(gen)氧(yang)化釔(yi)鍍層銥(yi)絲(si)的BPG400型真(zhen)空計(ji)，價(jia)格(ge)經濟(ji)，且可重復測(ce)量基準(zhun)壓(ya)力。傳(chuan)感(gan)元件(jian)自帶的在(zai)軌(gui)校準(zhun)數(shu)據在(zai)更(geng)換傳(chuan)感(gan)器時確保(bao)了高(gao)再(zai)現性。
益處(chu)

測(ce)量範(fan)圍(wei)非常廣(guang)，從(cong) 5×10-10 毫(hao)巴(ba)至大(da)氣(qi)壓(ya)（3.8×10-10 托至大(da)氣(qi)壓(ya)）

10-8 … 10-2 毫(hao)巴(ba)過(guo)程壓(ya)力範(fan)圍(wei)內 5% 的優(you)良可重復性(xing)

皮拉(la)尼(ni)聯(lian)鎖保護單(dan)絲，防止過(guo)早(zao)燒(shao)毀

兩(liang)根(gen)使用(yong)壽(shou)命(ming)長(chang)的氧(yang)化釔(yi)銥(yi)絲(si)

備(bei)有可(ke)選(xuan)的圖形(xing)顯(xian)示(shi)屏和現場總線(xian)接口(kou)

高(gao)真空皮拉(la)尼(ni)自動調(tiao)節(jie)，減(jian)少(shao)操作(zuo)員幹(gan)預(yu)

易於更(geng)換的傳(chuan)感(gan)元件(jian)與板載校準(zhun)數(shu)據確保(bao)高(gao)再(zai)現性

RoHS 合(he)規(gui)

典型(xing)應(ying)用(yong)

對(dui)半(ban)導體(ti)過(guo)程和傳(chuan)輸(shu)腔(qiang)室(shi)的壓力測量

工(gong)業鍍(du)膜

低真空(kong)和超(chao)高(gao)真空範(fan)圍(wei)內的壹般(ban)真(zhen)空(kong)測量和控制(zhi)
類(lei)型(xing) BPG402-S

測(ce)量範(fan)圍(wei)（空氣(qi)、O2、CO、N2）      5×10-10 … 1000

精(jing)度

10-8 … 10-2 毫(hao)巴(ba)    % of reading    ±15

可(ke)重復性(xing)

10-8 … 10-2 毫(hao)巴(ba)    % of reading    5

除氣(qi) (1)

p < 7.2 × 10-6 mbar    electron bombardment, max. 3 min

壓(ya)力，zui大(da)   bar (absolute)  2

溫(wen)度

運(yun)行（環(huan)境） °C 0 … +50

貯(zhu)存 °C -20 … +70

在(zai)法蘭處烘烤，無電(dian)子設(she)備(bei) BPG402-S °C 80

無(wu)電(dian)子設(she)備(bei)，在(zai)法蘭處烘烤 BPG402-SL    °C 150

電(dian)源(yuan)電(dian)壓     +20 … +28

輸(shu)出(chu)信(xin)號模擬

輸(shu)出(chu)信(xin)號 V   0 … +10

測(ce)量範(fan)圍(wei) V   +0.774 … +10

電(dian)壓與(yu)壓(ya)強(qiang)   volts per decade    0.75

錯(cuo)誤信(xin)號 V   0.1 / 0.3 / 0.5

zui小負載電(dian)阻 k?  10

設(she)定(ding)點繼(ji)電(dian)器

設(she)定(ding)點數(shu)量       1

範(fan)圍(wei) mbar    1×10-9 … 100

繼(ji)電(dian)器觸(chu)點(dian)       n.o., potential free

滯後(hou) % of reading    10

觸(chu)點(dian)額定值       ≤30

數(shu)字(zi)功能(neng)     degas

接口(kou)（數字(zi)）(2)      RS232C

發(fa)射控(kong)制(zhi)     automatic / manual via interface

單(dan)絲    two Yt2O3 coated Ir

單(dan)絲狀(zhuang)態/繼(ji)電(dian)器      LED / relay

電(dian)氣(qi)連(lian)接     D-Sub, 15-pin, male

電(dian)纜長度(du)，zui大(da) (3)   m (ft.) 100 (330)

暴(bao)露(lu)於真(zhen)空的材(cai)料(liao)     Yt2O3, Ir, Pt, Mo, Cu, W, NiFe, NiCr, stainless steel, glass

內(nei)部(bu)容積(ji) KF / CF cm³ (in.³) 24 (1.46) / 34 (2.1)

重量 KF / CF g   450 / 710

保(bao)護等級(ji)     IP30

Profibus DP

波特(te)率(lv)      9.6 / 19.2 / 93.75 / 187.5 / 500

地(di)址    2 switches (address 00 - 127) or network programmable

數(shu)字(zi)功能(neng)     read pressure, select units: Torr, mbar, Pa; emission control, degas function, monitor gauge status, filament status, safe state allows definition of behavior in case of error, detailed alarm and warning information

模(mo)擬功能(neng)     0 … 10 V analog output pressure indication, two setpoint relays A + B

設(she)定(ding)點繼(ji)電(dian)器： 設(she)定(ding)點數(shu)量     2

設(she)定(ding)點繼(ji)電(dian)器： 範(fan)圍(wei)  mbar    1×10-9 … 100

設(she)定(ding)點繼(ji)電(dian)器： 繼(ji)電(dian)器觸(chu)點(dian)     n.o., potential free

設(she)定(ding)點繼(ji)電(dian)器： 滯後(hou)  % of reading    10

設(she)定(ding)點繼(ji)電(dian)器： 觸(chu)點(dian)額定值     ≤30

Profibus DP 連(lian)接器       D-Sub, 9-pin, female

CDG（模(mo)擬輸出(chu)、電(dian)源(yuan)電(dian)壓、設(she)定(ding)點）連(lian)接器        D-Sub, 15-pin, male

DeviceNet™ 

協(xie)議    DeviceNet™, group 2 slave only

數(shu)據率(lv)開(kai)關(guan)   kBaud   125, 250, 500 or network programmable

電(dian)纜長度(du) 125 kbps    m (ft.) 500 (1650)

電(dian)纜長度(du) 250 kbps    m (ft.) 250 (825)

電(dian)纜長度(du) 500 kbps    m (ft.) 100 (330)

MAC ID      2 switches (address 00 - 63) or network programmable

數(shu)字(zi)功能(neng)     read pressure, select units: Torr, mbar, Pa; emission control, degas function, monitor gauge status, filament status, safe state allows definition of behavior in case of error, detailed alarm and warning information

模(mo)擬功能(neng)     0 … 10 V analog output pressure indication, two setpoint relays A + B

技(ji)術(shu)規(gui)格(ge)     DeviceNet™ "Vacuum Gauge Device Profile"

設(she)備(bei)類(lei)型(xing)     ''CG'' for combination gauge

I / O 從(cong)屬傳(chuan)訊(xun)       polling only

設(she)定(ding)點繼(ji)電(dian)器： 設(she)定(ding)點數(shu)量     2

設(she)定(ding)點繼(ji)電(dian)器： 範(fan)圍(wei)  mbar    1×10-9 … 100

設(she)定(ding)點繼(ji)電(dian)器： 繼(ji)電(dian)器觸(chu)點(dian)     n.o., potential free

設(she)定(ding)點繼(ji)電(dian)器： 滯後(hou)  % of reading    10

設(she)定(ding)點繼(ji)電(dian)器： 觸(chu)點(dian)額定值     ≤30

DeviceNet™ 電(dian)源(yuan)電(dian)壓      +11 … +25

真(zhen)空計(ji)電(dian)源(yuan)電(dian)壓       +20 … +28

DeviceNet™ 連(lian)接器        Microstyle, 5-pin

BPG（模(mo)擬輸出(chu)、電(dian)源(yuan)電(dian)壓、設(she)定(ding)點）連(lian)接器        D-Sub, 15-pin, male

以(yi)太網(wang) 

以(yi)太網(wang)協(xie)議       protocol specialized for EtherCAT

通(tong)訊標準(zhun)     ETG.5003 Part 1 "Semiconductor Device Profile" ETG.5003 Part 2080 "Specific Device Profile: Vacuum Pressure Gauge"

節(jie)點地(di)址     Explicit Device Identification

物(wu)理(li)層      100BASE-Tx (IEEE 802.3)

以(yi)太網(wang)數字(zi)功能(neng)       read pressure, select units: Torr, mbar, Pa emission control, degas function monitor gauge status, filament status safe state allows definition of behavior in case of error detailed alarm and warning information

過(guo)程數(shu)據     Fixed PDO mapping and configurable PDO mapping

(CoE)      SDO requests, responses and information

以(yi)太網(wang)連(lian)接件(jian)     RJ45, 8-pin (socket), IN and OUT

電(dian)纜    shielded Ethernet CAT5e or higher

電(dian)纜長度(du) m (ft.) ≤100 (330)

1) 除氣(qi)期(qi)間(jian)降低精度(du)

2) 同(tong)時使用(yong) RS232C 或 VGC40x 系(xi)列(lie)控制(zhi)器，不允許(xu)使用(yong)現場總線(xian)

3) 適(shi)用(yong)於(yu) RS232C 運(yun)行 <30m
353-570 BPG402-S BA Pirani Gauge; DN 25 ISO-KF

353-571 BPG402-S BA Pirani Gauge; DN 40 CF-R

353-572 BPG402-S 真(zhen)空計(ji)

353-573 BPG402-S BA Pirani Gauge; DN 40 CF-R

353-574 BPG402-SP BA Pirani Gauge; DN 25 ISO-KF

353-575 BPG402-SP BA Pirani Gauge; DN 40 CF-R

353-576 BPG402-SD 型(xing)真空(kong)計

353-577 BPG402-SD BA Pirani Gauge; DN 40 CF-R.

353-578 BPG402-SL BA Pirani Gauge; DN 40 CF-R

353-590 BPG402-SE ECAT, DN 25 ISO-KF

353-591 BPG402-SE ECAT, DN 40 CF-R
353-511 BPG400 24V電(dian)源(yuan)

353-512 Baffle for BPG400

211-113 中心(xin)圈(quan) with baffle DN 25 KF
354-494 BPG402 感(gan)應(ying)器

354-495 BPG402 Spare measurement system DN40CF-R